Edge detection in micrometrology with nearly confocal microscopy

Research output: Contribution to journalJournal articleResearchpeer-review

Translated title of the contributionEdge detection in micrometrology with nearly confocal microscopy
Original languageEnglish
JournalApplied Optics
Volume23
Issue number5
Pages (from-to)657-658
Number of pages2
ISSN1559-128X
Publication statusPublished - 1984
Externally publishedYes

ID: 98300265