Edge detection in micrometrology with nearly confocal microscopy
Research output: Contribution to journal › Journal article › Research › peer-review
Translated title of the contribution | Edge detection in micrometrology with nearly confocal microscopy |
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Original language | English |
Journal | Applied Optics |
Volume | 23 |
Issue number | 5 |
Pages (from-to) | 657-658 |
Number of pages | 2 |
ISSN | 1559-128X |
Publication status | Published - 1984 |
Externally published | Yes |
ID: 98300265